| Conformality in atomic layer deposition: Current status overview of analysis and modelling V Cremers, RL Puurunen, J Dendooven Applied Physics Reviews 6 (2), 2019 | 431 | 2019 |
| Tailoring nanoporous materials by atomic layer deposition C Detavernier, J Dendooven, SP Sree, KF Ludwig, JA Martens Chemical Society Reviews 40 (11), 5242-5253, 2011 | 410 | 2011 |
| Plasma enhanced atomic layer deposition of Ga 2 O 3 thin films RK Ramachandran, J Dendooven, J Botterman, SP Sree, D Poelman, ... Journal of Materials Chemistry A 2 (45), 19232-19238, 2014 | 143 | 2014 |
| Conformality of Al2O3 and AlN deposited by plasma-enhanced atomic layer deposition J Dendooven, D Deduytsche, J Musschoot, RL Vanmeirhaeghe, ... Journal of the Electrochemical Society 157 (4), G111, 2010 | 131 | 2010 |
| Modeling the conformality of atomic layer deposition: the effect of sticking probability J Dendooven, D Deduytsche, J Musschoot, RL Vanmeirhaeghe, ... Journal of The Electrochemical Society 156 (4), P63, 2009 | 121 | 2009 |
| Low-temperature atomic layer deposition of platinum using (methylcyclopentadienyl) trimethylplatinum and ozone J Dendooven, RK Ramachandran, K Devloo-Casier, G Rampelberg, ... The Journal of Physical Chemistry C 117 (40), 20557-20561, 2013 | 117 | 2013 |
| Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition J Dendooven, RK Ramachandran, E Solano, M Kurttepeli, L Geerts, ... Nature communications 8 (1), 1074, 2017 | 112 | 2017 |
| Amorphous and crystalline vanadium oxides as high-energy and high-power cathodes for three-dimensional thin-film lithium ion batteries F Mattelaer, K Geryl, G Rampelberg, J Dendooven, C Detavernier ACS applied materials & interfaces 9 (15), 13121-13131, 2017 | 96 | 2017 |
| In Situ X-ray Fluorescence Measurements During Atomic Layer Deposition: Nucleation and Growth of TiO2 on Planar Substrates and in Nanoporous Films J Dendooven, S Pulinthanathu Sree, K De Keyser, D Deduytsche, ... The Journal of Physical Chemistry C 115 (14), 6605-6610, 2011 | 89 | 2011 |
| Voltage-controlled ON–OFF ferromagnetism at room temperature in a single metal oxide film A Quintana, E Menendez, MO Liedke, M Butterling, A Wagner, V Sireus, ... ACS nano 12 (10), 10291-10300, 2018 | 77 | 2018 |
| Chemically triggered formation of two-dimensional epitaxial quantum dot superlattices W Walravens, J De Roo, E Drijvers, S Ten Brinck, E Solano, J Dendooven, ... ACS nano 10 (7), 6861-6870, 2016 | 72 | 2016 |
| Tuning the pore size of ink-bottle mesopores by atomic layer deposition J Dendooven, B Goris, K Devloo-Casier, E Levrau, E Biermans, ... Chemistry of Materials 24 (11), 1992-1994, 2012 | 70 | 2012 |
| The Influence of Ultrathin Amorphous ALD Alumina and Titania on the Rate Capability of Anatase TiO2 and LiMn2O4 Lithium Ion Battery Electrodes F Mattelaer, PM Vereecken, J Dendooven, C Detavernier Advanced Materials Interfaces 4 (13), 1601237, 2017 | 64 | 2017 |
| In Situ Monitoring of Atomic Layer Deposition in Nanoporous Thin Films Using Ellipsometric Porosimetry J Dendooven, K Devloo-Casier, E Levrau, R Van Hove, ... Langmuir 28 (8), 3852-3859, 2012 | 64 | 2012 |
| Deposition of MnO Anode and MnO2 Cathode Thin Films by Plasma Enhanced Atomic Layer Deposition Using the Mn(thd)3 Precursor F Mattelaer, PM Vereecken, J Dendooven, C Detavernier Chemistry of Materials 27 (10), 3628-3635, 2015 | 58 | 2015 |
| Molecular layer deposition of “vanadicone”, a vanadium-based hybrid material, as an electrode for lithium-ion batteries K Van de Kerckhove, F Mattelaer, J Dendooven, C Detavernier Dalton Transactions 46 (14), 4542-4553, 2017 | 56 | 2017 |
| Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries T Dobbelaere, F Mattelaer, J Dendooven, P Vereecken, C Detavernier Chemistry of Materials 28 (10), 3435-3445, 2016 | 56 | 2016 |
| Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing F Mattelaer, T Bosserez, J Rongé, JA Martens, J Dendooven, ... RSC advances 6 (100), 98337-98343, 2016 | 55 | 2016 |
| Aluminium atomic layer deposition applied to mesoporous zeolites for acid catalytic activity enhancement SP Sree, J Dendooven, TI Korányi, G Vanbutsele, K Houthoofd, ... Catalysis Science & Technology 1 (2), 218-221, 2011 | 55 | 2011 |
| Atomic layer deposition of ZnO–SnO2 composite thin film: The influence of structure, composition and crystallinity on lithium-ion battery performance B Zhao, F Mattelaer, J Kint, A Werbrouck, L Henderick, M Minjauw, ... Electrochimica Acta 320, 134604, 2019 | 54 | 2019 |
