Shaoren Deng
Cited by
Cited by
Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
D Longrie, S Deng, JW Maes
US Patent 11,450,529, 2022
Germanium surface passivation and atomic layer deposition of high-k dielectrics—a tutorial review on Ge-based MOS capacitors
Q Xie, S Deng, M Schaekers, D Lin, M Caymax, A Delabie, XP Qu, ...
Semiconductor Science and Technology 27 (7), 074012, 2012
Selective passivation and selective deposition
EE Tois, SP Haukka, RH Matero, E Färm, D Longrie, H Suemori, JW Maes, ...
US Patent 11,094,535, 2021
Atomic layer deposition-based synthesis of photoactive TiO 2 nanoparticle chains by using carbon nanotubes as sacrificial templates
S Deng, SW Verbruggen, Z He, DJ Cott, PM Vereecken, JA Martens, ...
Rsc Advances 4 (23), 11648-11653, 2014
Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer
J Wan, SR Deng, R Yang, Z Shu, BR Lu, SQ Xie, Y Chen, E Huq, R Liu, ...
Microelectronic Engineering 86 (4-6), 1238-1242, 2009
Air-based photoelectrochemical cell capturing water molecules from ambient air for hydrogen production
J Rongé, S Deng, SP Sree, T Bosserez, SW Verbruggen, NK Singh, ...
RSC advances 4 (55), 29286-29290, 2014
Nanostructured TiO2/carbon nanosheet hybrid electrode for high-rate thin-film lithium-ion batteries
S Moitzheim, CS Nimisha, S Deng, DJ Cott, C Detavernier, PM Vereecken
Nanotechnology 25 (50), 504008, 2014
Photocatalytic acetaldehyde oxidation in air using spacious TiO2 films prepared by atomic layer deposition on supported carbonaceous sacrificial templates
SW Verbruggen, S Deng, M Kurttepeli, DJ Cott, PM Vereecken, S Bals, ...
Applied Catalysis B: Environmental 160, 204-210, 2014
Heterogeneous TiO2/V2O5/Carbon Nanotube Electrodes for Lithium-Ion Batteries
M Kurttepeli, S Deng, F Mattelaer, DJ Cott, P Vereecken, J Dendooven, ...
ACS Applied Materials & Interfaces 9 (9), 8055-8064, 2017
Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices
S Deng, Q Xie, D Deduytsche, M Schaekers, D Lin, M Caymax, A Delabie, ...
Applied Physics Letters 99 (5), 2011
Cu adhesion on tantalum and ruthenium surface: Density functional theory study
SF Ding, SR Deng, HS Lu, YL Jiang, GP Ru, DW Zhang, XP Qu
Journal of Applied Physics 107 (10), 2010
Synthesis of uniformly dispersed anatase nanoparticles inside mesoporous silica thin films via controlled breakup and crystallization of amorphous TiO 2 deposited using atomic …
SP Sree, J Dendooven, K Masschaele, HM Hamed, S Deng, S Bals, ...
Nanoscale 5 (11), 5001-5008, 2013
Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications
C Gao, ZC Xu, SR Deng, J Wan, Y Chen, R Liu, E Huq, XP Qu
Microelectronic Engineering 88 (8), 2100-2104, 2011
Selective passivation and selective deposition
JWH Maes, ME Givens, SP Haukka, V Paruchuri, IJ Raaijmakers, S Deng, ...
US Patent 11,145,506, 2021
Porous nanostructured metal oxides synthesized through atomic layer deposition on a carbonaceous template followed by calcination
S Deng, M Kurttepeli, DJ Cott, S Bals, C Detavernier
Journal of Materials Chemistry A 3 (6), 2642-2649, 2015
22 nm silicon nanowire gas sensor fabricated by trilayer nanoimprint and wet etching
C Gao, SR Deng, J Wan, BR Lu, R Liu, E Huq, XP Qu, Y Chen
Microelectronic engineering 87 (5-8), 927-930, 2010
Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
S Deng, SW Verbruggen, S Lenaerts, JA Martens, S Van den Berghe, ...
Journal of Vacuum Science & Technology A 32 (1), 2014
High-Performance Ge MOS Capacitors byPlasma Passivation andAmbient Annealing
Q Xie, S Deng, M Schaekers, D Lin, M Caymax, A Delabie, Y Jiang, X Qu, ...
IEEE electron device letters 32 (12), 1656-1658, 2011
Synthesis of a 3D network of Pt nanowires by atomic layer deposition on a carbonaceous template
S Deng, M Kurttepeli, S Deheryan, DJ Cott, PM Vereecken, JA Martens, ...
Nanoscale 6 (12), 6939-6944, 2014
Surface plasmon polariton coupling induced transmission of subwavelength metallic grating with waveguide layer
ZC Xu, B Dong, J Xue, R Yang, BR Lu, S Deng, ZF Li, W Lu, Y Chen, ...
Microelectronic engineering 87 (5-8), 1297-1299, 2010
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